According to TSMC design rule, the definition of MIM and MOM are: MIM need two different metal layers, and insulator layer is between these two layers. MOM use metal fringe cap, so MOM only require one metal layer, but has area overhead.

未经允许不得转载：TacuLee » The Difference Between MIMCAP(Metal Insulator Metal Cap) and MOMCAP(Metal Oxide Metal Cap)